Out-of-Class Demo 3 / 课外实验3
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Microchannels
Follow the typical examples below. It is Okay if you comply with alternative processes from the book or a paper. It is NOT acceptable to directly copy the figures as your result.
Method 1:


Method 2:

DRIE: Deep Reactive Ion Etching
Method 3:

PR: Photo-Resist
PSG: Phospho-Silicate Glass
CVD: Chemical Vapor Deposition
DRIE: Deep Reactive Ion Etching
LPCVD: Low Pressure Chemical Vapor Deposition
Method 4:

PR: Photo-Resist
PSG: Phospho-Silicate Glass
CVD: Chemical Vapor Deposition
LPCVD: Low Pressure Chemical Vapor Deposition
Method 5:

PR: Photo-Resist

