- 单位:复旦大学 微电子学院
- 职称:教授
- 职位:复旦大学教师教学发展中心副主任
- 性别:男
- 社会职务:
- 微博:
个人简介
1995-2005年在复旦大学先后获得物理学学士、微电子学与固体电子学硕士和博士学位。2005年7月至今在复旦大学微电子学院任教。目前主要从事集成电路先进材料、工艺与器件研究,特别是集成电路MOS器件源漏栅接触技术方面的研究;先进铜互连技术,纳米新型器件研究;功率半导体器件研究;柔性器件研究;负责上海市精品课程《半导体物理》(微电子方向)和上海市重点课程《半导体器件原理》。
论文与著作
1. Zhong-Hua Li, Run-Ling Li, Yu-LongJiang*, Yan-Wei Zhang, Yong-Feng Cao, and Xue-Jiao Wang,PerformanceImprovement by Blanket Boron Implant in the Sigma-Shaped TrenchBefore theEmbedded SiGe Source/Drain Formation for 28-nm PMOSFET, IEEEElectron Device Letters,41(6): 796~799, 2020.(封面推荐文章)
2. Meng-Ya Fan,Gai-Ying Yang, Guang-Nan Zhou,Yang Jiang, Wen-Mao Li, Yu-Long Jiang*,andHong-Yu Yu, Ultra-Low Contact Resistivity of < 0.1 W· mm forAu-Free TixAly AlloyContact on Non-Recessed i-AlGaN/GaN,IEEEElectron Device Letters,41(1): 143~146, 2020.(封面文章)
3. Jian Zhang,Lin-Lin Wang, Hao Yu*,Merckling, Mols Clement, Vais Yves, Ramesh Abhitosh,Tsvetan Ivanov Siva, Marc Schaekers,Naoto Horiguchi, Dan Mocuta, NadineCollaert, Kristin De Meyer, Yu-Long Jiang*, “EffectiveContactResistivity Reduction for Mo/Pd/n-In0.53Ga0.47 asContact”, IEEEElectron Device Letters, 2019, 40(11): 1800-1803.
4. Jian Zhang, RobertSokolovskij, GanhuiChen, Yumeng Zhu, Yongle Qi, Xinpeng Lin, Wenmao Li, Guo-QiZhang, Yu-Long Jiang*, Hongyu Yu*,“Impact of high temperature H-2pre-treatment on Pt-AlGaN/GaN HEMT sensor for H2Sdetection”, Sensorsand Actuators B: Chemical, 2019, 280: 138-143.
5. Zhong-HuaLi, Yu-Long Jiang*, Run-LingLi, Yan-Wei Zhang, Yong-Feng Cao,“Performance Improvement by Cold XePre-Amorphization Implant for NickelSilicidation of 28-nm PMOSFET”, IEEEElectron Device Letters,2019, 40(5): 777-779.
6. Yong-Feng Cao, M.Arsalan, J. Liu, Yu-Long Jiang*, J. Wan*,“A Novel One-TransistorActive Pixel Sensor With In-Situ Photoelectron Sensingin 22 nm FD-SOITechnology”, IEEE Electron Device Letters, 2019,40(5):738-741.(封面文章)
7. Run-Ling Li,Lin-Lin Wang, Yu-Long Jiang*, “SignificantThreshold Voltage ShiftInduced by Ge Penetration into PMOSFET Channel of 28-nmSRAM”, IEEEElectron Device Letters, 2019, 40(1): 87-90.
8. Lin-Lin Wang, HaoYu, MarcSchaekers, Jean-Luc Everaert, Dan Mocuta, Naoto Horiguchi, NadineCollaert,Kristin De Meyer, Yu-LongJiang*, “Improved OhmicPerformance by the Metallic BilayerContact Stack of Oxygen-incorporatedLa/Ultrathin TiSix on n-Si”, IEEETransactions on Electron Devices,2018, 65(5):1869~1872.
9. Jian Zhang, HaoYu, Lin-Lin Wang,Marc Schaekers, D. Mocuta, Naoto Horiguchi, NadineCollaert, Kristin DeMeyer, Yu-Long Jiang*,“Thermal Stabilityof TiN/Ti/p+-Si0.3Ge0.7Contact With Ultralow ContactResistivity”, IEEE Electron Device Letters,2018.1.1, 39(1):83~86.(封面推荐文章)
10. Lin-Lin Wang, Hao Yu, M. Schaekers,J. -L.Everaert, A. Franquet, B. Douhard, L. Date, J. del Agua Borniquel,K.Hollar, F. A. Khaja, W. Aderhold, A. J. Mayur, J. Y. Lee, H. van Meer,D.Mocuta, N. Horiguchi, N. Collaert, K. De Meyer, Yu-Long Jiang*,“Comprehensivestudy of Ga activation in Si, SiGe and Ge with 5 × 10−10 Ω·cm2contactresistivity achieved on Ga doped Ge using nanosecondlaseractivation”, 2017 IEEE International Electron DevicesMeeting (IEDM),2017.12.2-2017.12.6.
11. Lin-Lin Wang, Jian-Chi Zhang, Yu-LongJiang*, “Optimizationof Ni(Pt)/Si-cap/SiGe Silicidation for pMOSSource/Drain Contact”, IEEETransactions on Electron Devices,2017.5.1, 64(5): 2067~2071.
12. Hao Yu, Marc Schaekers, Jian Zhang,Lin-LinWang, Jean-Luc Everaert, Naoto Horiguchi, Yu-Long Jiang*, DanMocuta,Nadine Collaert, Kristin De Meyer, “TiSi(Ge) Contacts Formed at LowTemperatureAchieving Around 2×10−9 Ω-cm2 Contact Resistivitiestop-SiGe”, IEEE Transactions on Electron Devices, 2017.2.1,64(2): 500~506.
13. Lin-Lin Wang, Wu Peng, and Yu-LongJiang*, “AModified 1/f Noise Model for MOSFETs With Ultra-Thin GateOxide”, IEEEElectron Device Letters, 2016, 37(5): 537~540.
14. Jian-Chi Zhang, Yu-LongJiang*,Bing-Zong Li, “Thermal Stability Improvement Induced by LaserAnnealingFor 50-Å Ni(Pt) Film Silicidation”, IEEE Transactionson Electron Devices,63(2), pp. 751-754, 2016.
15. Jing-Hang Hu, Jian-chiZhang,Zong-Yuan Fu, Jun-hui Weng, Wei-Bo Chen, Shi-Jin Ding*, Yu-LongJiang*, and Guo-dongZhu*, “Fabrication of Electrically BistableOrganic Semiconducting/Ferroelectric Blend Films by Temperature ControlledSpin Coating”, ACSAppl. Mater. Interfaces, 7, 6325−6330, 2015.
16. Zong-Yuan Fu, Jian-Chi Zhang,Jun-HuiWeng, Wei-Bo Chen, Yu-LongJiang*, Shi-Jin Ding*, and Guo-DongZhu*,“Piezo response Force Microscopy Study on Ferroelectric Polarizationof FerroelectricPolymer Thin Films with Various StructuralConfigurations. ”AIP Advances,5, p. 097211, 2015.
17. Lin-Lin Wang, Wu Peng, Yu-LongJiang*, Bing-ZongLi, “Effective Schottky Barrier Height Lowering by TiNCapping Layer forTiSix/Si Power Diode”, IEEE Electron Device Letters,36(6),pp. 597-599, 2015.
18. Jing-hang Hu, Jian-ChiZhang,Zong-Yuan Fu, Yu-LongJiang*, Shi-Jin Ding*, Guo-Dong Zhu*,“Solvent Vapor Annealingof Ferroelectric P(VDF-TrFE) Thin Films,” ACSAppl. Mater. Interfaces,6(20), p. 18312, 2014.
19. Rong-Hong Chen, Yu-LongJiang*, andBing-Zong Li, “Influence of Post-annealing on Resistivity of VOxThin Film”, IEEEElectron Device Letters, 35(7), pp. 780-782, 2014.
20. Jian-chi Zhang, Yu-LongJiang*,Guo-Dong Zhu, Guo-Ping Ru, and Bing-ZongLi, “Direct Observationof DipoleInfluence Induced by a Spin Coated Organic Interfacial Layer onEffective Schottky Barrier Height Modulation of Hg/Si Contact”, IEEEElectron Device Letters,35(2), pp. 262-264, 2014.
21. Long Li, Yu-Long Jiang*,andBing-Zong Li, “Ultrathin Ni(Pt)Si Film Formation Induced by LaserAnnealing”,IEEEElectron Device Letters, 34(7), pp. 912-914,2013.
22. Shao-Song Fu, Hao Yu, Yu-LongJiang*, andGuo-Dong Zhu, “Ultraviolet irradiation induced polarizationrestorationin electrically fatigued ferroelectric polymer films”, J. Appl.Phys.,113, p. 114102, 2013.
23. Hao Yu, Qi Xie, Yu-LongJiang*,Davy Deduytsche, and Christophe Detavernier,“Fermi LevelDepinning Failurefor Al/GeO2/Ge Contacts”, ECS Solid State Lett.,1(5), pp. 79-81,2012.
24. Yu-Long Jiang*, QiXie, Xing-PingQu, David WeiZhang, Davy Deduytsche, and Christophe Detavernier,“TaN/Ta as an EffectiveDiffusion Barrier for Direct Contact of Copper andNiSi”, Electrochem.Solid-State. Lett., 1(1), pp. H9-H13, 2012.
25. Shao-Song Fu, Hao Yu,Xiao-YaLuo, Yu-Long Jiang*,and Guo-Dong Zhu,“The Influence ofUltraviolet Irradiation on PolarizationFatigue in Ferroelectric PolymerFilms”, IEEE Electron Device Letters, 33(1),pp. 95-97, 2012.
26. Yu-Long Jiang*, Qi Xie, Xing-PingQu, Guo-Ping Ru,David Wei Zhang, Davy Deduytsche, andChristophe Detavernier, “EffectiveSchottky Barrier Height Modulation byan Ultrathin Passivation Layer ofGeOxNy for Al/n-Ge(100) Contact”,Electrochem. Solid-State. Lett., 14(12), pp.H487-H490, 2011.
27. Guo-Dong Zhu, Yan Gu,HaoYu,Shao-Song Fu, and Yu-Long Jiang*, “Polarizationfatiguein ferroelectric vinylidene fluorideand trifluoroethylene copolymer thinfilms”, J. Appl.Phys., 110, p. 024109,2011.
28. Quan-Li Li, Qi Xie, Yu-LongJiang*, Guo-Ping Ru, Xing-Ping Qu, Bing-Zong Li, David Wei Zhang, DavyDeduytsche,and Christophe Detavernier,“Annealing induced hysteresissuppressionfor TiN/HfO2/GeON/p-Ge capacitor”, Semicond. Sci.Technol., 26, p.125003, 2011.
29. Xiao Guo, Hao Yu, Yu-LongJiang*, Guo-Ping Ru, David Wei Zhang, and Bing-Zong Li, “Study ofnickelsilicide formation on Si(110) substrate”, App. Surf. Sci., 257,pp.10571– 10575, 2011.
30. Xiao-Rong Wang, Yu-LongJiang*,QiXie, Christophe Detavernier, Guo-Ping Ru, Xing-Ping Qu, andBing-Zong Li,“Annealing effect on the metal gate effective work functionmodulationfor the Al/TiN/SiO2/p-Si structure”, Microelectron. Eng.,88, p.573, 2011.
31. Yu-Long Jiang, Xin-PingQu*,Guo-Ping Ru, andBing-Zong Li, “Schottky barrier height lowering induced by CoSi2nanostructure”, Appl. Phys. A., 99, pp. 93–98,2010.
32. Yu-Long Jiang*, Guo-Ping Ru,Xing-Ping Qu, Bing-ZongLi, “X-ray photoelectron spectroscopy study of NiSi formation on shallowjunctions”, Appl. Surf. Sci., 256, pp.698–701, 2009.
33. Yu-Fei Huang, Yu-Long Jiang*,Guo-Ping Ru,and Bing-Zong Li, “Study of Ni/Si (1 0 0) solid-state reactionwith Al addition”,Appl. Surf. Sci., 254, pp. 5631–5634, 2008.
34. Yu-Fei Huang, Yu-Long Jiang*,Guo-Ping Ru,Xing-Ping Qu, and Bing-ZongLi, “Study of Ni/Si(100)solid-statereaction with Y addition”, Microelectron. Eng., 85, pp.2013-2015,2008.
35. Jia Luo, Yu-Long Jiang*,Guo-PingRu, Bing-Zong Li, and Paul KChu, “Silicidation of Ni(Yb) Film on Si(001)”,J.Electron. Material., 37, pp. 245-248, 2008.
36. Yu-Long Jiang*, Qi Xie, Christophe Detavernier, R.L. Van Meirhaeghe, Guo-Ping Ru,Xing-Ping Qu, Bing-Zong Li, Paul K Chu,“Growth of Pinhole Free YtterbiumSilicide Film by Solid-State Reaction onSi(001) with a Thin Amorphous SiInterlayer”, J. Appl. Phys., 102, p. 033508,2007.
37. Yu-Long Jiang*, Jia Luo, Ye Yao, Fang Lu, Guo-PingRu, Xing-Ping Qu, and Bing-Zong Li,“Schottky contact barrier heightextraction by admittance measurement”,J. Appl. Phys., 101, p. 053705,2007.
38. Yu-Long Jiang*, Qi Xie, C. Detavernier, R. L. VanMeirhaeghe, Guo-Ping Ru, Xing-Ping Qu, Bing-Zong Li, An-Ping Huang, andPaul K Chu, “Oxidation suppression inytterbium silicidation by Ti/TiNbi-capping layer”, J. Vac. Sci. Technol.A, 25, pp. 285-289, 2007.
39. Yu-Long Jiang*,Guo-Ping Ru, Xing-Ping Qu,Bing-Zong Li, C. Detavernier, R. L. Van Meirhaeghe, “Lineargrowth of Ni2Si thin film on n+/pjunction at low temperature”, J. Mater.Res., 21, pp.3017-3021,2006.
40. Yu-Long Jiang*, Guo-Ping Ru, Xing-Ping Qu,Bing-Zong Li, Aditya Agarwal, John Poate, Khalid Hossain, and WayneHolland, “Arsenic redistribution induced by low temperatureNi silicidation at 450oConshallow junctions”, J. Electron. Material.35,pp.937-940, 2006.
41. Yu-Long Jiang*, Aditya Agarwal, Guo-Ping Ru, GaryCai, and Bing-Zong Li, “Nickel silicide formation on shallow junctions”,Nucl. Instr. and Meth. Phys. Res. B,237, pp.160-166, 2005.
42. Yu-Long Jiang*, Guo-Ping Ru, Wei Huang, Xing-PingQu, Aditya Agarwal, YongLiu, Bing-ZongLi, Aditya Agarwal, Gary Cai, JohnPoate, C. Detavernier, andR. L. Van Meirhaeghe,“Electrical characterization of NiSi/Siinterfaces formed by a single and atwo-step rapid thermal silicidation”, Semicond.Sci. Technol., 20, pp.716-719, 2005.
43. Yu-Long Jiang*, Guo-Ping Ru,Jian-Hai Liu, Xing-PingQu, and Bing-Zong Li, “The reaction characteristics of ultra-thin Ni filmon undoped and doped Si (100)”, J.Electron. Material, 33, pp.770-773, 2004.
44. Yu-Long Jiang, Aditya Agarwal, Guo-Ping Ru*,Xing-Ping Qu, John Poate, Bing-Zong Li, and Wayne Holland, “Nickel silicidationon n and p-type junctions at 300oC”, Appl. Phys. Lett., 85, pp.410-412, 2004.
45. Yu-Long Jiang, Guo-Ping Ru*, Fang Lu, Xing-PingQu, Bing-Zong Li, and Shi-Ning Yang,“Ni/Si solid phase reaction studiedby temperature-dependentcurrent-voltage technique”, J. Appl. Phys., 93,pp. 866-870, 2003.
46. Yu-Long Jiang*, “Schottkybarrierheight modulation for advanced source/drain contact”,Proceedingsof 19thAsia-Pacific workshop on fundamentals and applications ofadvancedsemiconductor devices(2011年6月, 韩国大田)pp. 66-70. (Invited)
47. Yu-LongJiang*, Guo-Ping Ru,Xing-Ping Qu, Bing-Zong Li, “OxidationSuppressionforYbSi2-x Formation andNew Method to Extract SchottkyBarrier Height by Admittance Measurement”,Extended Abstracts ofthe7thInternational Workshop on Junction Technology(IWJT2007) (2007年6月, 日本京都)pp. 93-98.(Invited)
荣誉与奖励
复旦大学卓学计划教授,2010年度复旦大学教学成果奖一等奖第一完成人,复旦大学2011年度青年教师教学比赛一等奖,上海市2007年度青年科技启明星,教育部2008年度霍英东教育基金会资助项目获得者。
2003.02:首届GE基金会全国大学生技术创新竞赛“爱迪生杯”获得者;
2003.12:国际电子电气工程师协会电子器件分会全球研究生奖获得者(IEEE EDS GraduateStudent Fellowship);
2006.12:2005年度上海市优秀博士学位论文获得者;
2007.01:复旦微电子研究院优秀新员工奖;
2009.01:信息学院三等奖教金;
2010.01:信息学院二等奖教金;
2010.06:复旦大学教学成果奖一等奖,第一获奖人;
2011.01:复旦微电子研究院先进个人;
2011.06:信息学院优秀共产党员;
2011.12:复旦大学首届青年教师教学竞赛一等奖;
2012.05: 2011-2012年度“学生学术科技创新行动计划”优秀指导教师;
2012.07:信息学院2011年度本科教学先进个人;
2013.01:信息学院二等奖教金;
2014.06:上海市教学成果奖二等奖;
2016.07:复旦大学教学贡献奖;
2018.06:教育部在线教育研究中心“智慧教学之星”;
2018.09:复旦大学“十佳教师”;
2018.09:上海市教学成果奖二等奖;
2018.09:上海市教学成果奖一等奖;
2019.09:上海市育才奖;
2020.04:复旦大学“廖凯原最受欢迎教师奖”;
2020.06:复旦大学2020届本(专)科毕业生“我心目中的好老师”;